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9N series purifier（0.1ppb）
Application field:

Application areas: electronic semiconductors, large-scale integrated circuits, MAMS, monocrystalline silicon polycrystalline silicon and silicon epitaxy, LED, TFT, gallium nitride, silicon carbide, scientific research and development, experimental analysis, etc.

Characteristics:

● Two towers alternate adsorption regeneration, automatic continuous operation
● EP class 316L polished stainless steel pipe fittings
● Removal rate up to 99.9999999% with 0.003 m filter
● Siemens PLC can be connected to DCS system
● The security alarm function is perfect
● Remote cloud service is available
● Production and assembly in a super clean environment
● Gas capacity 10-20000nm3 /h

9N ultrapure gas purifier


Series models

For gas

Raw gas index

Product gas index


N2

H2

O2

Ar

He

O2

H2O

CO2

CO

CH4

H2

N2

顆粒度


9VV

●

●

●

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

—

0.003μm

9OVV

●

—

●

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

0.003μm

9VVX

—

—

—

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

0.003μm

—

●

—

—

—

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

0.003μm

9X

—

—

—

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

0.003μm

—

●

—

—

—

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

0.003μm

Note: Common flow specifications：1-20000Nm3/h;Commonly used pressure：1-20Mpa

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