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8NPSeries conventional model parameter table

Applicable gas

N2, H2, O2, Ar, He, NH3, SiH4, HCL

Processing capacity (L/min)

5

10

20

30

50

100

150

200

300

500

800

1000

Length (mm)

120

150

225

220

200

385

500

360

508

760

600

716

diameter

2'

2.5'

3'

4'

Inlet/outlet connector

1/4 VCR

1/2 VCR

Working pressure (Mpa)

1

Maximum gas pressure difference (Mpa)

0.1

Purification index

Single impurity＜1ppb

Service life

Six months (return to factory for regeneration)

? O Special models can be customized according to customer requirements.

9NP series conventional model parameter table

Applicable gas

N2, H2, O2, Ar, He, NH3, SiH4, HCL

Processing capacity (L/min)

5

10

20

30

50

100

150

200

300

500

800

1000

Length (mm)

130

180

275

260

380

500

435

550

780

600

900

1100

diameter

2'

2.5'

3'

4'

6'

Inlet/outlet connector

1/4 VCR

1/2 VCR

Working pressure (Mpa)

1

Maximum gas pressure difference (Mpa)

0.1

Purification index

Single impurity＜0.1ppb

Service life

Six months (return to factory for regeneration)

? O Special models can be customized according to customer requirements.